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Vol. 26 No. 5 (2014): Vol 26 Issue 5

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Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate

https://doi.org/10.14233/ajchem.2014.17231
Tae-Sik Oh
Department of Information Display, Sun Moon University, Asan, Chungnam, Republic of Korea
Seungjoon Ahn
Department of Information Display, Sun Moon University, Asan, Chungnam, Republic of Korea
Dae-Wook Kim
Department of Information Display, Sun Moon University, Asan, Chungnam, Republic of Korea
Seong Joon Ahn
Department of I & C Engineering, Sun Moon University, Asan, Chungnam, Republic of Korea
Ho Seob Kim
Department of Information Display, Sun Moon University, Asan, Chungnam, Republic of Korea

Corresponding Author(s) : Ho Seob Kim

hskim3@sunmoon.ac.kr

Asian Journal of Chemistry, Vol. 26 No. 5 (2014): Vol 26 Issue 5

Abstract

The electrodes of the electron optical microcolumn are precisely fabricated using the micro-electro-mechanical systems technology, which makes it possible to minimize the electron beam size as well as the optical aberrations compared with those of the conventional electron columns. It is, however, necessary to make the apertures of the electrodes very small to obtain high resolution and it takes lots of time and effort to align the apertures of the electrodes. In this work, we have designed a new structure of electron optical microcolumn in which the apertures of the electrodes are relatively large, so the alignment is very easy to carry out while maintaining the modest resolving power (sub 50-nm).

Keywords

Microcolumn Auxiliary control electrode Electron beam size Sub-50nm resolution
Oh, T.-S., Ahn, S., Kim, D.-W., Joon Ahn, S., & Seob Kim, H. (2014). Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate. Asian Journal of Chemistry, 26(5), 1358–1362. https://doi.org/10.14233/ajchem.2014.17231
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