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Fabrication and Structural Properties of Al-N-Co-Fe/Zr Thin Film
Corresponding Author(s) : Chang-Suk Han
Asian Journal of Chemistry,
Vol. 27 No. 11 (2015): Vol 27 Issue 11
Abstract
Al-N-Co-(Zr/Fe/Zr-Fe) films were prepared by using a two-facing target type dc sputtering (TFTS) system. The deposited films were annealed isothermally at 773 K and their magnetic properties and resistivity were investigated. This TFTS method is suitable for preparing Al-N-Co-(Zr/Fe/Zr-Fe) films. The X-ray diffraction profile for Al-N-Co-Zr film shows that it crystallized into the phases of AlN and b-Co, while the profiles for Al-N-Co-Fe and Al-N-Co-Zr-Fe films show that they crystallize into three phases of AlN, b-Co and a-Co. Resistivity shows monotonous increase with increasing annealing time for all kinds of films. The highest resistivity was found for Al-N-Co-Fe-Zr film while lowest was obtained for Al-N-Co-Zr films.
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- W. Shi, R. Liang and X. Ma, Acta Phys. Sin., 53, 3614 (2004).
- F. Wei, D. Wu, D. Zheng, B. Ma and Z. Yang, Mater. Sci. Eng. B, 68, 156 (2000); doi:10.1016/S0921-5107(99)00585-1.
- E.N. Sheftel, A.V. Shalimova and G.S. Usmanova, Phys. Met. Metallogr., 96, 414 (2003).
- N. Ma, W.T. Zheng, X. Wang and L.L. Wang, J. Alloys Comp., 477, 915 (2009); doi:10.1016/j.jallcom.2008.11.001.
- Z.S. Wang, Y.T. Lai and J.G. Duh, Physica Status Solidi Appl. Mater. Sci., 209, 773 (2012); doi:10.1002/pssa.201127500.
- H. Wu, Y. Liu and Y. Dai, Acta Metall. Sin., 38, 1087 (2002).
- C.S. Han and Y.H. Kim, Met. Mater. Int., 20, 153 (2014); doi:10.1007/s12540-013-6025-8.
References
W. Shi, R. Liang and X. Ma, Acta Phys. Sin., 53, 3614 (2004).
F. Wei, D. Wu, D. Zheng, B. Ma and Z. Yang, Mater. Sci. Eng. B, 68, 156 (2000); doi:10.1016/S0921-5107(99)00585-1.
E.N. Sheftel, A.V. Shalimova and G.S. Usmanova, Phys. Met. Metallogr., 96, 414 (2003).
N. Ma, W.T. Zheng, X. Wang and L.L. Wang, J. Alloys Comp., 477, 915 (2009); doi:10.1016/j.jallcom.2008.11.001.
Z.S. Wang, Y.T. Lai and J.G. Duh, Physica Status Solidi Appl. Mater. Sci., 209, 773 (2012); doi:10.1002/pssa.201127500.
H. Wu, Y. Liu and Y. Dai, Acta Metall. Sin., 38, 1087 (2002).
C.S. Han and Y.H. Kim, Met. Mater. Int., 20, 153 (2014); doi:10.1007/s12540-013-6025-8.