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Key-Hole Type Quadrupole Lens Test for Advanced Operation of a Microcolumn
Corresponding Author(s) : Young-Chul Kim
Asian Journal of Chemistry,
Vol. 26 No. 5 (2014): Vol 26 Issue 5
Abstract
An electron lens is an important part of a microcolumn for focusing electron beam on a sample plane. In this study, we introduced a new type electron lens with a key-hole type quadrupole electrode to improve the microcolumn for advanced operation. And, we analyzed electron beam characteristics of the electron lens using a 3-D simulation analysis.
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- Y.C. Kim, S.-J. Ahn, D.-W. Kim, W.K. Jang and H.-S. Kim, Asian J. Chem., 24, 4197 (2012).
- E. Kratschmer, H.S. Kim, M.G.R. Thomson, K.Y. Lee, S.A. Rishton, M.L. Yu and T.H.P. Chang, J. Vac. Sci. Technol. B, 13, 2498 (1995); doi:10.1116/1.588381.
- J.P. Spallas, C.S. Silver, L.P. Muray, T. Wells and M. El-Gomati, Microelectron. Eng., 83, 984 (2006); doi:10.1016/j.mee.2006.01.245.
- L.P. Muray, C.S. Silver and J.P. Spallas, J. Vac. Sci. Technol. B, 24, 2945 (2006); doi:10.1116/1.2375088.
- R. Saini, Z. Jandric, I. Gory, S.A.M. Mentink and D. Tuggle, J. Vac. Sci. Technol. B, 24, 813 (2006); doi:10.1116/1.2178374.
- M.G.R. Thomson and T.H.P. Chang, J. Vac. Sci. Technol. B, 13, 2445 (1995); doi:10.1116/1.588018.
- T.-S. Oh, S.W. Jin, S.K. Choi, Y.C. Kim, D.-W. Kim, S. Ahn, Y.B. Lee and H.-S. Kim, J. Optical Soc. Korea, 15, 368 (2011); doi:10.3807/JOSK.2011.15.4.368.
- H.S. Kim, D.W. Kim, S.J. Ahn, Y.C. Kim, S.S. Park, K.W. Park, N.W. Hwang, S.W. Jin and S.Y. Bae, Microelectron. Eng., 85, 782 (2008); doi:10.1016/j.mee.2007.12.042.
- T.S. Oh, D.W. Kim, Y.C. Kim, S. Ahn, G.H. Lee and H.S. Kim, J. Vac. Sci. Technol. B, 28, C6C69 (2010); doi:10.1116/1.3502658.
References
Y.C. Kim, S.-J. Ahn, D.-W. Kim, W.K. Jang and H.-S. Kim, Asian J. Chem., 24, 4197 (2012).
E. Kratschmer, H.S. Kim, M.G.R. Thomson, K.Y. Lee, S.A. Rishton, M.L. Yu and T.H.P. Chang, J. Vac. Sci. Technol. B, 13, 2498 (1995); doi:10.1116/1.588381.
J.P. Spallas, C.S. Silver, L.P. Muray, T. Wells and M. El-Gomati, Microelectron. Eng., 83, 984 (2006); doi:10.1016/j.mee.2006.01.245.
L.P. Muray, C.S. Silver and J.P. Spallas, J. Vac. Sci. Technol. B, 24, 2945 (2006); doi:10.1116/1.2375088.
R. Saini, Z. Jandric, I. Gory, S.A.M. Mentink and D. Tuggle, J. Vac. Sci. Technol. B, 24, 813 (2006); doi:10.1116/1.2178374.
M.G.R. Thomson and T.H.P. Chang, J. Vac. Sci. Technol. B, 13, 2445 (1995); doi:10.1116/1.588018.
T.-S. Oh, S.W. Jin, S.K. Choi, Y.C. Kim, D.-W. Kim, S. Ahn, Y.B. Lee and H.-S. Kim, J. Optical Soc. Korea, 15, 368 (2011); doi:10.3807/JOSK.2011.15.4.368.
H.S. Kim, D.W. Kim, S.J. Ahn, Y.C. Kim, S.S. Park, K.W. Park, N.W. Hwang, S.W. Jin and S.Y. Bae, Microelectron. Eng., 85, 782 (2008); doi:10.1016/j.mee.2007.12.042.
T.S. Oh, D.W. Kim, Y.C. Kim, S. Ahn, G.H. Lee and H.S. Kim, J. Vac. Sci. Technol. B, 28, C6C69 (2010); doi:10.1116/1.3502658.