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Fabrication of Porous Thin Film Core for Micro-Fluxgate by Using Anodic Aluminum Oxide Templates
Corresponding Author(s) : Hui Lv
Asian Journal of Chemistry,
Vol. 25 No. 11 (2013): Vol 25 Issue 11
Abstract
Porous thin film core is conducive to impelling the micro-fluxgate toward the direction of low power consumption and high sensitivity. In this experiment, anodic aluminum oxide templates were obtained by two-step anodization process. We could obtain a copper template by two-step replication of the anodic aluminum oxide template. Furthermore, porous Fe-Ni thin film was fabricated by magnetron sputtering on the copper template. The morphology of the porous film complies with the anticipation. The characteristic of the pores can be changed by adjusting the experimental parameters.
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- P. Ripka, IEEE Transc. Magn., 34, 1303 (1998).
- P. Ripka, Sens. Actuators A, 33, 129 (1992).
- P. Ripka, Sens. Actuators A, 106, 8 (2003).
- L. Shibin, Sens. Actuators A, 130, 124 (2006).
- F.E. Rasmussen, Sens. Actuators A, 92, 242 (2001).
- T. Veres, Thin Solid Films, 382, 172 (2001).
- H. Masuda and K. Fukuda, Science, 268, 1466 (1995).
- H. Chick and J.M. Xu, Mater. Sci. Eng. R, 43, 103 (2004).
- K.H. Lee, Y.P. Huang and C.C. Wong, Electrochim. Acta, 56, 2394 (2011).
- L. Zaraska, G.D. Sulka and M. Jaskula, Surf. Coat. Technol., 205, 2432 (2010).
- Q. Wang, X. Sun, S. Luo, L. Sun, X. Wu and M. Cao, Cryst. Growth Des., 7, 2665 (2007).
- N.J. Gerein and J.A. Haber, J. Phys. Chem. B, 109, 17372 (2005).
- W. Lee, R. Ji and U. Gosele, Nature Mater., 105, 741 (2006).
- G.D. Sulka and K.G. Parkola, Thin Solid Film., 515, 338 (2006).
References
P. Ripka, IEEE Transc. Magn., 34, 1303 (1998).
P. Ripka, Sens. Actuators A, 33, 129 (1992).
P. Ripka, Sens. Actuators A, 106, 8 (2003).
L. Shibin, Sens. Actuators A, 130, 124 (2006).
F.E. Rasmussen, Sens. Actuators A, 92, 242 (2001).
T. Veres, Thin Solid Films, 382, 172 (2001).
H. Masuda and K. Fukuda, Science, 268, 1466 (1995).
H. Chick and J.M. Xu, Mater. Sci. Eng. R, 43, 103 (2004).
K.H. Lee, Y.P. Huang and C.C. Wong, Electrochim. Acta, 56, 2394 (2011).
L. Zaraska, G.D. Sulka and M. Jaskula, Surf. Coat. Technol., 205, 2432 (2010).
Q. Wang, X. Sun, S. Luo, L. Sun, X. Wu and M. Cao, Cryst. Growth Des., 7, 2665 (2007).
N.J. Gerein and J.A. Haber, J. Phys. Chem. B, 109, 17372 (2005).
W. Lee, R. Ji and U. Gosele, Nature Mater., 105, 741 (2006).
G.D. Sulka and K.G. Parkola, Thin Solid Film., 515, 338 (2006).