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Vol. 23 No. 5 (2011): Vol 23 Issue 5

Fabrication and Characterization of a Low Voltage Micro-Electron Column for Scan Field Size and Magnification

Young Chul Kim1
1Department of Optometry, Eulji University, Seongnam-si, Gyeonggi-do 461-713, South Korea 2Department of Information and Display, Sunmoon University, Asan-si, Chungnam-do 336-708, South Korea 3Division of Electronic, Computer and Communication Engineering, Hanseo University, Seosan-si, Chungnam-do 356-706, South Korea *Corresponding author: E-mail: jwk@hanseo.ac.kr
Ho Seob Kim2
1Department of Optometry, Eulji University, Seongnam-si, Gyeonggi-do 461-713, South Korea 2Department of Information and Display, Sunmoon University, Asan-si, Chungnam-do 336-708, South Korea 3Division of Electronic, Computer and Communication Engineering, Hanseo University, Seosan-si, Chungnam-do 356-706, South Korea *Corresponding author: E-mail: jwk@hanseo.ac.kr
Jun Oh Park3
1Department of Optometry, Eulji University, Seongnam-si, Gyeonggi-do 461-713, South Korea 2Department of Information and Display, Sunmoon University, Asan-si, Chungnam-do 336-708, South Korea 3Division of Electronic, Computer and Communication Engineering, Hanseo University, Seosan-si, Chungnam-do 356-706, South Korea *Corresponding author: E-mail: jwk@hanseo.ac.kr
Won Kweon Jang3
1Department of Optometry, Eulji University, Seongnam-si, Gyeonggi-do 461-713, South Korea 2Department of Information and Display, Sunmoon University, Asan-si, Chungnam-do 336-708, South Korea 3Division of Electronic, Computer and Communication Engineering, Hanseo University, Seosan-si, Chungnam-do 356-706, South Korea *Corresponding author: E-mail: jwk@hanseo.ac.kr

Asian Journal of Chemistry, Vol. 23 No. 5 (2011): Vol 23 Issue 5

Abstract

Fabrication and characterization of a low voltage micro-electron column are reviewed. Many optical technologies in fabrication of a micro-electron-column such as laser aid optical alignment and in situ laser bonding are introduced in assembling basic components of micro-electron column. The maximum field of view and scan field size were investigated as a function of biased voltage of deflectors and electron emission tip voltage. The magnification and the linearity of zooming current image dependant on the electron emission tip voltage are also discussed.

Keywords

Fabrication Low voltage micro-electron column Scan field size Magnification.
Chul Kim1, Y., Seob Kim2, H., Oh Park3, J., & Kweon Jang3, W. (2011). Fabrication and Characterization of a Low Voltage Micro-Electron Column for Scan Field Size and Magnification. Asian Journal of Chemistry, 23(5), 2303–2305. Retrieved from https://asianpubs.org/index.php/ajchem/article/view/10321
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