Bahari, A., M. Roodbari M. Atyabi, and P. Morgen. “Distinctive Feature of Thermally Grown Ultra Thin Silicon Nitride Film”. Asian Journal of Chemistry 21, no. 3 (March 30, 2010): 2405–2411. Accessed November 29, 2024. https://asianpubs.org/index.php/ajchem/article/view/18743.