Chen, Z.; Zhu, L.; Hong, L.; Xue, C.; Liu, M.; Zheng, X.; Hu, Y.; Ye, Q.; Hu3, X. AZO (ZnO:Al) Transparent Conductive Film Prepared by Plasma Enhanced Chemical Vapour Deposition and Its Performances in Comparison With ZnO Film. ajc 2014, 26, 1625-1627.